Department of Materials Science and Engineering

High-Vacuum Mode:

• Resolution: 3.5nm (Acc V 30kV, WD 8mm)
• Probe Current: 1pA to 0.3?m

Low-Vacuum Mode:

• Resolution: 4 nm
• Adjustable pressure: 10 to 270 Pa
• Lowest pressure: 1 Pa

Accelerating Voltage: 0.5 to 30kv

• Magnification: 8x to 300,000x
• Electron Detector: Secondary and Backscatter
• Filament: Tungsten

Specimen Stage: Type: Eucentric

• Movements: X, Y, Z movement 20mm, 10mm, 43mm respectively
• Tilt: -10 to 90, Rotation: 360

Specimen Holder:

• 10mm diameter x 10mm
• 32mm diameter x 10mm
• Vise holder

EDS: Oxford Instruments, INCA mics/x-stream/SEM TVA3

Dell Precision 350: (for SEM control)

• Jeol SEM console software
• AnalySIS imaging software

Compaq Evo: (for EDS control)

• INCA EDS software

Both Compaq and Dell computers controlled via KVM switch.

Both computers can upload data to a ftp site (ftp://websem.mse.iastate.edu:555/).